Analog Mass Flow Controller
GENERAL FEATURES
- High Accuracy at Low Flow
- Fast response
- Compact Connection
- High Stability Removable Sensor
- High Corrosion Resistance
- Perfect Linearity
- Excellent Long Term Stability
- Wide Pressure Range Available
Technicial Specifications
Belgeler
MODEL
Full Scale N₂
(slpm)
Accuracy
(% FS)
Repeatability
(%)
Response time
(second)
Input / Output signal
(Vdc / mA)
Power Supply
(Vdc)
Operating pressure
(psia)
Operating temperature
(° C)
M3030VA
0.01-30
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
5-1300
0-50
MS30V
0.01-30
± 1.0
± 0.25
<2
0-5
+15
5-1300
0-50
M3100VA
30--100
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
30-1300
0-50
M3200VA
30-150
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
5-1300
0-50
M3300VA
100-300
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
45-240
0-50
M3400VA
100-500
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
60-240
0-50
M3500VA
300-1000
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
60-240
0-50
M3600VA
1000-1500
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
60-100
0-50
M3700VA
1500-2000
± 1.0
± 0.25
<2
0-5 or 4-20
15-24
60-100
0-50